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74 FR 56374, Oct. 30, 2009, unless otherwise noted.
75 FR 74818, Dec. 1, 2010, unless otherwise noted.
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At 90 FR 21227, May 19, 2025, as required by the Congressional Review Act and Public Law 119-2, the Environmental Protection Agency removed the amendments to §§ 98.3 and 98.4 made effective on Jan. 17, 2025, at 89 FR 91163, Nov. 18, 2024. As of May 19, 2025, §§ 98.3 and 98.4 reverted to the Jan. 16, 2025 version.
| All processes | Process gas i | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CF4 | C2 F6 | CHF3 | CH2 F2 | CH3 F | C3 F8 | C3 F8 Remote | C4 F8 | NF3 | NF3
Remote |
SF6 | C4 F6 | C5 F8 | C4 F8 O | |
| 1-Ui | 0.65 | 0.80 | 0.37 | 0.20 | 0.30 | 0.30 | 0.063 | 0.183 | 0.19 | 0.018 | 0.30 | 0.15 | 0.100 | NA |
| BCF4 | NA | 0.21 | 0.076 | 0.060 | 0.029 | 0.21 | NA | 0.045 | 0.040 | 0.037 | 0.033 | 0.059 | 0.109 | NA |
| BC2 F6 | 0.058 | NA | 0.058 | 0.043 | 0.0093 | 0.18 | NA | 0.027 | 0.0204 | NA | 0.041 | 0.062 | 0.083 | NA |
| BC4 F6 | 0.0083 | NA | 0.01219 | NA | 0.001 | NA | NA | 0.008 | NA | NA | NA | NA | NA | NA |
| BC4 F8 | 0.0046 | NA | 0.00272 | 0.054 | 0.007 | NA | NA | NA | NA | NA | NA | 0.0051 | NA | NA |
| BC3 F8 | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.00012 | NA |
| BCH2 F2 | 0.005 | NA | 0.0024 | NA | 0.0033 | NA | NA | 0.0021 | 0.00034 | 0.00088 | 0.000020 | 0.000030 | NA | NA |
| BCH3 F | 0.0061 | NA | 0.027 | 0.0036 | NA | 0.0007 | NA | 0.0063 | 0.0036 | 0.0028 | 0.0082 | 0.00065 | NA | NA |
| BCHF3 | 0.012 | NA | NA | 0.057 | 0.016 | 0.012 | NA | 0.028 | 0.0106 | 0.000059 | 0.0039 | 0.017 | 0.0069 | NA |
| BF2 | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.50 | NA | NA | NA | NA |
[89 FR 31922, Apr. 25, 2024]