Site Feedback

Title 40

Displaying title 40, up to date as of 7/09/2026. Title 40 was last amended 7/09/2026.
eCFR Content

The Code of Federal Regulations (CFR) is the official legal print publication containing the codification of the general and permanent rules published in the Federal Register by the departments and agencies of the Federal Government. The Electronic Code of Federal Regulations (eCFR) is a continuously updated online version of the CFR. It is not an official legal edition of the CFR.

Learn more about the eCFR, its status, and the editorial process.

Title 40Protection of EnvironmentPart / Section
Chapter IEnvironmental Protection Agency1 – 1099
Subchapter CAir Programs50 – 99
Part 63National Emission Standards for Hazardous Air Pollutants for Source Categories63.1 – 63.12099
Subpart BBBBBNational Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing63.7180 – 63.7195
What This Subpart Covers63.7180 – 63.7183
§ 63.7180What is the purpose of this subpart?
§ 63.7181Am I subject to this subpart?
§ 63.7182What parts of my facility does this subpart cover?
§ 63.7183When do I have to comply with this subpart?
Emission Standards63.7184
§ 63.7184What emission limitations, operating limits, and work practice standards must I meet?
Compliance Requirements63.7185 – 63.7188
§ 63.7185What are my general requirements for complying with this subpart?
§ 63.7186By what date must I conduct performance tests or other initial compliance demonstrations?
§ 63.7187What performance tests and other compliance procedures must I use?
§ 63.7188What are my monitoring installation, operation, and maintenance requirements?
Applications, Notifications, Reports, and Records63.7189 – 63.7192
§ 63.7189What applications and notifications must I submit and when?
§ 63.7190What reports must I submit and when?
§ 63.7191What records must I keep?
§ 63.7192In what form and how long must I keep my records?
Other Requirements and Information63.7193 – 63.7195
§ 63.7193What parts of the General Provisions apply to me?
§ 63.7194Who implements and enforces this subpart?
§ 63.7195What definitions apply to this subpart?
Table 1 to Subpart BBBBB of Part 63
Requirements for Performance Tests
Table 2 to Subpart BBBBB of Part 63
Applicability of General Provisions to Subpart BBBBB