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Electronic Code of Federal Regulations

e-CFR data is current as of November 15, 2019

Title 40Chapter ISubchapter CPart 98Subpart I → Appendix


Title 40: Protection of Environment
PART 98—MANDATORY GREENHOUSE GAS REPORTING
Subpart I—Electronics Manufacturing


Table I-7 To Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing

Process type factorsProcess gas i
CF4C2F6CHF3CH2F2C3F8c− C4F8NF3
Remote
NF3SF6
Etch 1-Ui0.70.40.4NANA0.2NANA0.4
Etch BCF4NA0.2NANANA0.1NANANA
Etch BC2F6NANANANANA0.1NANANA
CVD Chamber Cleaning 1-UiNA0.6NANA0.10.1NA0.30.4
CVD Chamber Cleaning BCF4NA0.2NANA0.20.1NANANA

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]

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