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Electronic Code of Federal Regulations

e-CFR data is current as of November 14, 2019

Title 40Chapter ISubchapter CPart 98Subpart I → Appendix


Title 40: Protection of Environment
PART 98—MANDATORY GREENHOUSE GAS REPORTING
Subpart I—Electronics Manufacturing


Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing

Process type factorsProcess gas i
CF4C2F6CHF3CH2F2C3F8c− C4F8NF3
Remote
NF3SF6
Etch 1-Ui0.6NA0.2NANA0.1NANA0.3
Etch BCF4NANA0.07NANA0.009NANANA
Etch BCHF3NANANANANA0.02NANANA
Etch BC2F4NANA0.05NANANANANANA
CVD Chamber Cleaning 1-UiNANANANANANA0.030.30.9

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]

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