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Electronic Code of Federal Regulations

e-CFR data is current as of November 12, 2019

Title 40Chapter ISubchapter CPart 98Subpart I → Appendix


Title 40: Protection of Environment
PART 98—MANDATORY GREENHOUSE GAS REPORTING
Subpart I—Electronics Manufacturing


Table I-5 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS Manufacturing

Process type factorsProcess gas i
CF4C2F6CHF3CH2F2C3F8c− C4F8NF3
Remote
NF3SF6C4F6aC5F8aC4F8Oa
Etch 1-Ui0.710.410.410.06NA10.2NA0.20.20.10.2NA
Etch BCF4NA10.410.0710.08NA0.2NANANA10.30.2NA
Etch BC2F6NANANANANA0.2NANANA10.20.2NA
CVD Chamber Cleaning 1-Ui0.90.6NANA0.40.10.020.2NANA0.10.1
CVD Chamber Cleaning BCF4NA0.1NANA0.10.120.0220.1NANA0.10.1
CVD Chamber Cleaning BC3F8NANANANANANANANANANANA0.4

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

1Estimate includes multi-gas etch processes.

2Estimate reflects presence of low-k, carbide and multi-gas etch processes that may contain a C-containing fluorinated GHG additive.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]

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