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Electronic Code of Federal Regulations

e-CFR data is current as of November 12, 2019

Title 40Chapter ISubchapter CPart 98Subpart I → Appendix


Title 40: Protection of Environment
PART 98—MANDATORY GREENHOUSE GAS REPORTING
Subpart I—Electronics Manufacturing


Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination

Product typeEmission factors EFi
CF4C2F6CHF3C3F8NF3SF6
Semiconductors (kg/m2)0.901.000.040.050.040.20
LCD (g/m2)0.50NANANA0.904.00
MEMS (kg/m2)NANANANANA1.02

Notes: NA denotes not applicable based on currently available information.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013]

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